方正微 2007-2014 roadmap

Road Map for FMIC Process
CMOS Logic&Mixed Mode(逻辑与混合)			BCD/Analog/ Bipolar (BCD /模拟/双极)	Power MOSFET/IGBT(功率器件IGBT)
				MEMS/Memory/Others(MEMS/储存和其他)
Si-GATE CMOS	0.35um SPTM 1.5V	MG	2.0um NPSM 1.5V/5V	Planar DMOS	2.0um Planar DMOS 600V
	0.35um SPDM 5V		2.25um NPSM 1.5V/3V		1.0um Planar DMOS 500-650V
	0.4um SPSM Flatcell		2.5um NPSM 3V/5V		1.0um Planar DMOS(Shrink) 200-800V
	0.40 um Embedded Flash		6.0um NPSM 18V	Trench DMOS	0.4um Trench DMOS 20-75V
	0.5um SPSM 1.5v 5V		6.0um NPSM 24V		0.4um Trench DMOS 100V
	0.5um DPSM 5V		2.0um Metal Gate 5V		0.4um  Trench DMOS(ESD) 20V
	0.5um SPDM 5V		6um Metal Gate 30V		0.4um Trench DMOS(P) 20-30V
	0.5um DPDM 40V		2.5um Metal Gate 5V		0.4um Trench 20-75V DMOS
	0.5um OTP	BCDMOS BiCMOS	800V CDMOS		0.4um Trench DMOS PCH 60-100V
	0.6um SPSM 5V				0.4u Trench DMOS(P) 60V
	0.6um SPDM 5V		1.0um BCD 700V	Trench SBD
	0.6um DPSM/DM 5V		1.5um 1P2M BCD 30V
	0.8um SPSM 5V		1.0um 1P2M BCD 30V
	0.8um SPDM 5V		3.0um BCD 700V
	0.8um  Mixed Mode		1.5um 1P2M BCD 30V
			1.0um 1P2M BCD 30V
	0.5um 1P1M 5V		1.0um 1P2M  40V
	2.25um Metal Gate 5V		0.8um BCD 20V	MOS SBD
	0.6um 1P1M 5V		1.0um BCD 700V
	0.8um 1P2M 5V		0.4um Trench  PCH  20-30V
	0.6um 2P2M 5V/18V
	0.6um 1P2M 5V		1.0µm 700V BiCMOS
	0.5um 1P1M 1.5V		0.5µm 20-60V BiCMOS
	0.35um 1P3M 1.5V		1.0µm 5-30V BiCMOS
	0.5um Mixed Mode			IGBT	600-1200V
	0.35um 1P2M 5V				IGBT  1000-1200V
	0.5 um 2P2M 40V	Bipolar	1.0um Bipolar 24V/40V		IGBT  600-1000V
	0.5um  1P2M 5V	MEMS	0.4um Flat cell 1P1M 5V
	0.8umMixed Mode		0.5um 120V Schottky		0.5um Trench 45-120V
	0.8/1.0um 2P2M 40V		0.5um OTP
	0.5um 2P1M 5V		0.5um 45-100V Schottky
			MEMS	JFET
			0.40 umEmbedded Flash	TVS
				GaNenhanced MOSFET
				HV CMOS	0.8/1.0um 2P2M 40V