2021年6月11日
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摘要： (12) United States Patent Spady et al. (10) Patent No.: (45) Date of Patent: Aug. 24, 2004 COMPACT ROTATING STAGE10/1991 Kato414/936 12/1998 Suzuki et 阅读全文
posted @ 2021-06-11 12:45 lhmchn 阅读(86) 评论(0) 推荐(0) 编辑
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摘要： (12) United States Patent Botos US006700249B1 (10) Patent No.: US Bl (45) Date of Patent: Mar. 2, 2004 (54) DIRECT DRIVE VERTICAL LIFT AND ROTATION ST 阅读全文
posted @ 2021-06-11 10:00 lhmchn 阅读(122) 评论(0) 推荐(0) 编辑
THETA Z DRIVE APPARATUS AND STAGE APPARATUS
摘要： US 20130033123Al (19) United States (12) Patent Application Publication (10) Pub. No.: US 2013/0033123 Al KUBOTA et al. (43) Pub. Date: Feb. 7, 2013 ( 阅读全文
posted @ 2021-06-11 09:37 lhmchn 阅读(48) 评论(0) 推荐(0) 编辑