Cannot debug x64 Process with VS2010 SP1 under Win7 64
Delete the file "C:\Program" or "D:\Program".
http://social.msdn.microsoft.com/Forums/ta/vsdebug/thread/63275f50-c640-4ee4-9408-cd47d42e9144
I found the reason for my problem by comparing my ProcessMonitor output with the output of a machine that works ok. It turned out, that for some reason I had a file called "Program" in my C:\. This obviously confused VS2010 in finding the path to msvsmon.
After deleting this strange "Program" file, now I can debug x64.